JPS59122008A - チツプ状圧電共振子の製造方法 - Google Patents
チツプ状圧電共振子の製造方法Info
- Publication number
- JPS59122008A JPS59122008A JP22941182A JP22941182A JPS59122008A JP S59122008 A JPS59122008 A JP S59122008A JP 22941182 A JP22941182 A JP 22941182A JP 22941182 A JP22941182 A JP 22941182A JP S59122008 A JPS59122008 A JP S59122008A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- piezoelectric substrate
- electrode
- chip
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000005530 etching Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 14
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 6
- 238000007740 vapor deposition Methods 0.000 claims abstract description 5
- 238000004544 sputter deposition Methods 0.000 claims abstract description 4
- 238000007733 ion plating Methods 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 238000000605 extraction Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 abstract description 22
- 229910000679 solder Inorganic materials 0.000 abstract description 3
- 241000272470 Circus Species 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22941182A JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22941182A JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59122008A true JPS59122008A (ja) | 1984-07-14 |
| JPH0215132B2 JPH0215132B2 (en]) | 1990-04-11 |
Family
ID=16891795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22941182A Granted JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59122008A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638468A (en) * | 1984-08-03 | 1987-01-20 | Raytheon Company | Polymer hydrophone array with multilayer printed circuit wiring |
-
1982
- 1982-12-27 JP JP22941182A patent/JPS59122008A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638468A (en) * | 1984-08-03 | 1987-01-20 | Raytheon Company | Polymer hydrophone array with multilayer printed circuit wiring |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215132B2 (en]) | 1990-04-11 |
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